Heat Removal using Graphene Lateral Heat Spreaders in SOI Integrated Circuits




Over many years, Silicon-on-insulator (SOI) wafers are offering a great benefit over traditional silicon device structure due to their improved electrical isolation, reduced parasitic capacitances, improved radiation hardness, and higher packing density [1]. But at the same time, the buried oxide in SOI metal–oxide–semiconductor field-effect transistor (MOSFET) structures electrically and thermally insulates the active channel from the substrate. As a result, the temperature can rise excessively in SOI MOSFETs leading to performance degradation and early thermal breakdowns. Therefore, effective thermal management becomes a vital part here to ensure the long term reliability and optimal performance.

Input Data

The model can be made using the dimensions as shown:

Geometry dimensions from [1]

The material data for each component can also be extracted from [1].


The purpose of this project is to study the feasibility of a graphene as a lateral heat spreaders in SOI-based chips. The effectiveness of the heat removal via graphene material from these type of chips is the main goal here. The results for comparison can be found below:

Temperature distribution across SOI with seven active transistors (a) without graphene and (b) with graphene heat spreaders attached to heat sinks. © Temperature profile over the top surface of SOI MOSFET with and without graphene heat spreaders [1].

Key Words

Graphene, heat conduction, heat spreaders, hot spots, silicon-on-insulator (SOI), thermal management.

Literature & Sources


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