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MEMS COMBDRIVE ACTUATOR
Statistics
1 Geometry
1 Mesh
1 Simulation setup
4 Results
1 Geometry 1 Mesh 1 Simulation setup 4 ResultsAbout this project
This project focuses on the modeling and simulation of a MEMS electrostatic comb-drive actuator, which is a micro-scale device used for precise motion control. A comb-drive actuator consists of two interdigitated comb-like structures: one fixed and one movable. When a voltage is applied between them, an electrostatic force is generated due to the electric field, which causes the movable comb to displace. In this project, the electrostatic behavior is first modeled mathematically using MATLAB, where the force generated due to applied voltage is calculated. Both linear and nonlinear spring models are used to determine displacement, providing a more realistic representation of MEMS behavior. The calculated electrostatic force is then applied in SimScale as an equivalent mechanical force to perform structural simulation. This allows visualization of displacement and deformation of the comb structure in a 3D environment. The project also includes parametric analysis by varying voltage and geometric parameters such as gap between comb fingers. The results demonstrate the relationship between voltage, force, and displacement, validating the working principle of electrostatic actuation.
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