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Design of a MEMS Pressure Sensor using Simscale
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0 Geometries 0 Meshes 0 Simulation setups 0 ResultsAbout this project
This case study presents the design, modelling, and structural simulation of a MEMS-based piezoresistive pressure sensor using SimScaJe, a cloud-based finite element analysis (FEA) platform that is freely accessible to students. The study focuses on a thin silicon diaphragm that deflects under applied pressure, generating mechanical stress that is subsequently measured by piezoresistive elements embedded at the diaphragm edges.
